GSI Automation operates a world class, NIST traceable, mass flow and pressure calibration repair facility. This convenient location utilizes state-of-the-art equipment and procedures to insure accuracy, reliability and safety for repairs, recalibrations and expedited shipment of new devices. We offer responsive local service for Semiconductor Fabs, OEM's, & Research Facilities.
- Class 100 Hard Wall Clean Room
- MFM, MFC, and Pressure Controller Calibration
- Analog, Smart, and DeviceNetÔ Support
- Pressure Test to 3000 psig
- Helium Leak Test to 1 x 10 –10 atm cc/sec He
- Vacuum to 2000 psig pressure capabilities
- Gases and Ranges:
- H2: 3 sccm to 260 slm
- He: 3 sccm to 130 slm
- Ar: 3 sccm to 80 slm
- N2: 3 sccm to 100 slm
|
 |
GSI Automation can repair, re-range, and recalibrate Mass Flow Controllers and Pressure Controllers on an expedited basis. Each calibration includes computer generated calibration data with performance curves. As found and as left documentation/reporting is available.
 |
- Mass Flow Controllers
- Nema 4/ Div 2 Mass Flow Controllers
- Pressure Controllers
- Secondary Electronics and Cables
|
back to top